Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703769 | Light source, EUV lithography system, and method for performing circuit layout patterning process | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2023-07-18 |
| 11650508 | Plasma position control for extreme ultraviolet lithography light sources | Hsin-Feng Chen, Chi-Ming Yang, Li-Jui Chen | 2023-05-16 |