Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841625 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2023-12-12 |
| 11768437 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2023-09-26 |
| 11703769 | Light source, EUV lithography system, and method for performing circuit layout patterning process | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2023-07-18 |
| 11693324 | System and method for detecting debris in a photolithography system | Shih-Yu Tu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |
| 11675272 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Shang-Chieh Chien, Chun-Lin Chang, Li-Jui Chen +1 more | 2023-06-13 |
| 11662668 | Lithography contamination control | Tai-Yu Chen, Cho-Ying Lin, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-05-30 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Sheng-Kang Yu +5 more | 2023-05-09 |
| 11630393 | Apparatus and method for generating extreme ultraviolet radiation | Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-04-18 |
| 11632849 | Method and apparatus for mitigating contamination | Tai-Yu Chen, Hung-Jung Hsu, Cho-Ying Lin, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-04-18 |