Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662668 | Lithography contamination control | Chieh Hsieh, Tai-Yu Chen, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-05-30 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Sagar Deepak Khivsara, Hsiang Chen, Chieh Hsieh, Sheng-Kang Yu +5 more | 2023-05-09 |
| 11632849 | Method and apparatus for mitigating contamination | Chieh Hsieh, Tai-Yu Chen, Hung-Jung Hsu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-04-18 |