Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11754928 | Lithography exposure method with debris removing mechanism | — | 2023-09-12 |
| 11632849 | Method and apparatus for mitigating contamination | Chieh Hsieh, Tai-Yu Chen, Cho-Ying Lin, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-04-18 |