Issued Patents 2023
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854846 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li | 2023-12-26 |
| 11852978 | EUV lithography system with 3D sensing and tunning modules | Tai-Yu Chen, Tzu-Jung Pan, Kuan-Hung Chen, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-12-26 |
| 11841625 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Chieh Hsieh, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2023-12-12 |
| 11822259 | Acoustic particle deflection in lithography tool | Tai-Yu Chen, Sagar Deepak Khivsara, Shang-Chieh Chien, Kai Tak Lam | 2023-11-21 |
| 11747735 | EUV vessel perimeter flow auto adjustment | Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-09-05 |
| 11694820 | Radiation source apparatus and method for using the same | Wei-Chung Tu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |
| 11693326 | System and method for dynamically controlling temperature of thermostatic reticles | Tzu-Jung Pan, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |
| 11696503 | Two-dimensional thermal electric generators | Qiliang Li, Abbas Arab | 2023-07-04 |
| 11650512 | Reticle cleaning device and method of use | Che-Chang Hsu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-05-16 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Chieh Hsieh +5 more | 2023-05-09 |
| 11605477 | EUV lithography apparatus | Cheng-Hung Tsai, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2023-03-14 |
| 11567415 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2023-01-31 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |