Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11855192 | Semiconductor device and manufacturing method thereof | Han-Yu Lin, Fang-Wei Lee, Raghunath PUTIKAM, Tzer-Min Shen, Li-Te Lin +4 more | 2023-12-26 |
| 11822259 | Acoustic particle deflection in lithography tool | Tai-Yu Chen, Sagar Deepak Khivsara, Shang-Chieh Chien, Sheng-Kang Yu | 2023-11-21 |
| 11768437 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien +5 more | 2023-09-26 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Chieh Hsieh +5 more | 2023-05-09 |