Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822259 | Acoustic particle deflection in lithography tool | Tai-Yu Chen, Shang-Chieh Chien, Kai Tak Lam, Sheng-Kang Yu | 2023-11-21 |
| 11768437 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2023-09-26 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Hsiang Chen, Chieh Hsieh, Sheng-Kang Yu +5 more | 2023-05-09 |