Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854846 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Sheng-Kang Yu, Chi-Feng Tung, Hsiang Yin Shen | 2023-12-26 |
| 11735451 | Stocker system for wafer cassette | Ching-Jung Chang, Chi-Feng Tung, Hsiang Yin Shen | 2023-08-22 |