Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2023-11-07 |
| 11576250 | Semiconductor processing tool and methods of operation | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Yu-Kuang SUN, Cheng-Hsuan Wu +3 more | 2023-02-07 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Yu-Huan Chen +7 more | 2023-01-10 |