Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11567415 | Inspection system for extreme ultraviolet (EUV) light source | Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen, Sheng-Kang Yu | 2023-01-31 |
| 11553581 | Radiation source apparatus and method for using the same | Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen +7 more | 2023-01-10 |