Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2023-11-07 |
| 11653438 | Droplet collecting system and method of using the same | Ming-Hsun Tsai, Shang-Chieh Chien | 2023-05-16 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen +7 more | 2023-01-10 |