Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2023-11-07 |
| 11653438 | Droplet collecting system and method of using the same | Yu-Fa LO, Shang-Chieh Chien | 2023-05-16 |
| 11644759 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen, Chia-Chen Chen | 2023-05-09 |
| 11602037 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Heng-Hsin Liu | 2023-03-07 |
| 11576250 | Semiconductor processing tool and methods of operation | Cheng-Hao LAI, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +3 more | 2023-02-07 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |