Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832372 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Jen-Yang Chung, Li-Jui Chen, Tzung-Chi Fu +1 more | 2023-11-28 |
| 11823828 | Inductive device and method of manufacturing the same | JUI-MIN CHUNG, Hung-Pin Lin | 2023-11-21 |
| 11681232 | Exhaust system with u-shaped pipes | Yu-Fu Lin, Shih-Chang Shih | 2023-06-20 |
| 11644759 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen | 2023-05-09 |