Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809075 | EUV lithography mask with a porous reflective multilayer structure | Chih-Tsung Shih, Li-Jui Chen, Po-Chung Cheng | 2023-11-07 |
| 11681232 | Exhaust system with u-shaped pipes | Yu-Fu Lin, Chia-Chen Chen | 2023-06-20 |
| 11657492 | Reticle backside inspection method | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Li-Jui Chen | 2023-05-23 |