Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832372 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Li-Jui Chen, Tzung-Chi Fu +1 more | 2023-11-28 |
| 11592754 | Advanced load port for photolithography mask inspection tool | Tung-Jung Chang, Han-Lung Chang | 2023-02-28 |