Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747735 | EUV vessel perimeter flow auto adjustment | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-09-05 |
| 11703763 | Method of lithography process using reticle container with discharging device | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2023-07-18 |
| 11650512 | Reticle cleaning device and method of use | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-05-16 |