Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852978 | EUV lithography system with 3D sensing and tunning modules | Tai-Yu Chen, Kuan-Hung Chen, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-12-26 |
| 11693326 | System and method for dynamically controlling temperature of thermostatic reticles | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |