Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809083 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +6 more | 2023-11-07 |
| 11693324 | System and method for detecting debris in a photolithography system | Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |
| 11599030 | Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus | Po-Chung Cheng, Hsiao-Lun Chang, Li-Jui Chen, Han-Lung Chang | 2023-03-07 |