Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774844 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG +1 more | 2023-10-03 |
| 11720025 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Chih-Tsung Shih, Yu-Hsun Wu, Bo-Tsun Liu | 2023-08-08 |
| 11703762 | Method of reducing undesired light influence in extreme ultraviolet exposure | Chih-Tsung Shih, Chen-Ming Wang, Yahru Cheng, Bo-Tsun Liu | 2023-07-18 |
| 11614683 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung-Chih Chien, Hao-Shiang Chang | 2023-03-28 |