Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774844 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG, Bo-Tsun Liu +1 more | 2023-10-03 |
| 11614683 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung Chuan Lee, Hao-Shiang Chang | 2023-03-28 |