Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822256 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Li-Jui Chen, Heng-Hsin Liu | 2023-11-21 |
| 11809087 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Li-Jui Chen, Heng-Hsin Liu | 2023-11-07 |