Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803129 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Zong-You YANG, Chih-Chun CHIANG, Yi-Fam Shiu +3 more | 2023-10-31 |
| 11782350 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Wei Chen +3 more | 2023-10-10 |