Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747741 | Substrate stage, substrate processing system using the same, and method for processing substrate | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-09-05 |
| 11556065 | Wafer stage and method thereof | Yu-Huan Chen, Yu-Chih Huang, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-01-17 |