Issued Patents 2023
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11556065 | Wafer stage and method thereof | Yu-Huan Chen, Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Li-Jui Chen | 2023-01-17 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |