Issued Patents All Time
Showing 26–50 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804167 | Methods and systems for co-located metrology | David Y. Wang, Esen Salcin, Michael Friedmann, Derrick Shaughnessy, Jonathan M. Madsen +1 more | 2020-10-13 |
| 10801953 | Semiconductor metrology based on hyperspectral imaging | David Y. Wang, Alexander Buettner, Stilian Ivanov Pandev, Emanuel Saerchen, Barry Blasenheim | 2020-10-13 |
| 10769320 | Integrated use of model-based metrology and a process model | Alexander Kuznetsov, Stilian Ivanov Pandev | 2020-09-08 |
| 10767978 | Transmission small-angle X-ray scattering metrology system | Antonio Arion Gellineau, Sergey Zalubovsky | 2020-09-08 |
| 10732516 | Process robust overlay metrology based on optical scatterometry | Stilian Ivanov Pandev, Wei Lu | 2020-08-04 |
| 10712145 | Hybrid metrology for patterned wafer characterization | Boxue Chen, Andrei Veldman, Alexander Kuznetsov | 2020-07-14 |
| 10648796 | Optical metrology with small illumination spot size | Noam Sapiens, Kevin Peterlinz, Alexander Buettner, Kerstin Purrucker | 2020-05-12 |
| 10612916 | Measurement of multiple patterning parameters | Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2020-04-07 |
| 10545104 | Computationally efficient X-ray based overlay measurement | John J. Hench, Michael S. Bakeman | 2020-01-28 |
| 10533848 | Metrology and control of overlay and edge placement errors | Frank Laske, Nadav Gutman | 2020-01-14 |
| 10502694 | Methods and apparatus for patterned wafer characterization | Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Alexander Kuznetsov | 2019-12-10 |
| 10504759 | Semiconductor metrology with information from multiple processing steps | Alexander Kuznetsov, Antonio Arion Gellineau | 2019-12-10 |
| 10490462 | Metrology systems and methods for process control | Stilian Ivanov Pandev, Dzmitry Sanko | 2019-11-26 |
| 10458912 | Model based optical measurements of semiconductor structures with anisotropic dielectric permittivity | Houssam Chouaib, Qiang Zhao, Zhengquan Tan | 2019-10-29 |
| 10438825 | Spectral reflectometry for in-situ process monitoring and control | Prateek Jain, Daniel Wack, Kevin Peterlinz, Shankar Krishnan | 2019-10-08 |
| 10401738 | Overlay metrology using multiple parameter configurations | Andrew V. Hill, Amnon Manassen, Noam Sapiens | 2019-09-03 |
| 10352876 | Signal response metrology for scatterometry based overlay measurements | Stilian Ivanov Pandev, Jonathan M. Madsen, Alexander Kuznetsov, Walter D. Mieher | 2019-07-16 |
| 10352695 | X-ray scatterometry metrology for high aspect ratio structures | Thaddeus Gerard Dziura, Antonio Arion Gellineau | 2019-07-16 |
| 10345095 | Model based measurement systems with improved electromagnetic solver performance | Stilian Ivanov Pandev, Leonid Poslavsky, Dzmitry Sanko | 2019-07-09 |
| 10324050 | Measurement system optimization for X-ray based metrology | John J. Hench, Michael S. Bakeman | 2019-06-18 |
| 10215688 | Optical metrology tool equipped with modulated illumination sources | Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2019-02-26 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin, Ilya Bezel +16 more | 2019-02-12 |
| 10151986 | Signal response metrology based on measurements of proxy structures | Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Leonid Poslavsky | 2018-12-11 |
| 10152678 | System, method and computer program product for combining raw data from multiple metrology tools | Stilian Ivanov Pandev, Thaddeus Gerard Dziura | 2018-12-11 |
| 10139352 | Measurement of small box size targets | Stilian Ivanov Pandev, Wei Lu, Pablo I. Rovira, Jonathan M. Madsen | 2018-11-27 |