Issued Patents All Time
Showing 76–97 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9243886 | Optical metrology of periodic targets in presence of multiple diffraction orders | Alexander Kuznetsov, Kevin Peterlinz | 2016-01-26 |
| 9116103 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer +3 more | 2015-08-25 |
| 9019999 | Efficient and compact visible microchip laser source with periodically poled nonlinear materials | Stepan Essaian, Dzhakhangir V. Khaydarov | 2015-04-28 |
| 8982358 | Apparatus and method of measuring roughness and other parameters of a structure | Gregory Brady, Kevin Peterlinz | 2015-03-17 |
| 8879073 | Optical metrology using targets with field enhancement elements | Jonathan M. Madsen, Michael S. Bakeman, Thaddeus Gerard Dziura, Alexander Kuznetsov, Bin-Ming Benjamin Tsai | 2014-11-04 |
| 8860937 | Metrology systems and methods for high aspect ratio and large lateral dimension structures | Thaddeus Gerard Dziura, Xuefeng Liu, David Y. Wang, Jonathan M. Madsen, Alexander Kuznetsov +3 more | 2014-10-14 |
| 8649404 | Compact and efficient visible laser source with high speed modulation | Stepan Essaian, Dzhakhangir V. Khaydarov | 2014-02-11 |
| 8000357 | Compact, efficient and robust ultraviolet solid-state laser sources based on nonlinear frequency conversion in periodically poled materials | Stepan Essaian | 2011-08-16 |
| 7826071 | Parametric profiling using optical spectroscopic systems | Anatoly Fabrikant, Mehrdad Nikoonahad, Ady Levy, Daniel Wack, Noah Bareket +2 more | 2010-11-02 |
| 7742510 | Compact solid-state laser with nonlinear frequency conversion using periodically poled materials | Stepan Essaian | 2010-06-22 |
| 7724797 | Solid-state laser arrays using nonlinear frequency conversion in periodically poled materials | Stepan Essaian | 2010-05-25 |
| 7570676 | Compact efficient and robust ultraviolet solid-state laser sources based on nonlinear frequency conversion in periodically poled materials | Stepan Essaian | 2009-08-04 |
| 7375810 | Overlay error detection | Mehrdad Nikoonahad, Guoheng Zhao, Ben-ming Benjamin Tsai | 2008-05-20 |
| 7359420 | Manufacturable vertical extended cavity surface emitting laser arrays | Jason Watson, Dicky Lee, Arvydas Umbrasas, Rene Dato, John R. Green +2 more | 2008-04-15 |
| 7357513 | System and method for driving semiconductor laser sources for displays | Jason Watson, Aram Mooradian | 2008-04-15 |
| 7322704 | Frequency stabilized vertical extended cavity surface emitting lasers | — | 2008-01-29 |
| 7312881 | Parametric profiling using optical spectroscopic systems to adjust processing parameter | Anatoly Fabrikant, Mehrdad Nikoonahad | 2007-12-25 |
| 7296897 | Projection display apparatus, system, and method | Aram Mooradian, Jason Watson | 2007-11-20 |
| 7280230 | Parametric profiling using optical spectroscopic systems | Anatoly Fabrikant, Mehrdad Nikoonahad, Ady Levy, Daniel Wack, Noah Bareket +2 more | 2007-10-09 |
| 7023549 | Parametric profiling using optical spectroscopic systems | Anatoly Fabrikant, Mehrdad Nikoonahad | 2006-04-04 |
| 7009704 | Overlay error detection | Mehrdad Nikoonahad, Guoheng Zhao, Ben-ming Benjamin Tsai | 2006-03-07 |
| 6900892 | Parametric profiling using optical spectroscopic systems | Anatoly Fabrikant, Mehrdad Nikoonahad | 2005-05-31 |