Issued Patents All Time
Showing 126–150 of 170 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6879392 | Method and apparatus for inspecting defects | Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2005-04-12 |
| 6850320 | Method for inspecting defects and an apparatus for the same | Yukihiro Shibata, Yukio Kembo | 2005-02-01 |
| 6841403 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Minori Noguchi, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2005-01-11 |
| 6819416 | Defect inspection method and apparatus therefor | Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto, Hiroaki Shishido +1 more | 2004-11-16 |
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-10-19 |
| 6800859 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Minoru Yoshida, Sachio Uto | 2004-10-05 |
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Minori Noguchi, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2004-09-28 |
| 6799130 | Inspection method and its apparatus, inspection system | Takafumi Okabe, Kaoru Sakai | 2004-09-28 |
| 6765201 | Ultraviolet laser-generating device and defect inspection apparatus and method therefor | Sachio Uto, Minoru Yoshida, Toshihiko Nakata | 2004-07-20 |
| 6762831 | Method and apparatus for inspecting defects | Yukihiro Shibata | 2004-07-13 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-06-22 |
| 6721047 | Method and apparatus for inspecting defects of a specimen | Atsushi Shimoda, Sachio Uto, Minoru Yoshida, Toshihiko Nakata | 2004-04-13 |
| 6690469 | Method and apparatus for observing and inspecting defects | Yukihiro Shibata, Kazuo Yamaguchi, Minoru Yoshida, Atsushi Yoshida, Kenji Oka +1 more | 2004-02-10 |
| 6674890 | Defect inspection method and apparatus therefor | Kenji Oka, Hiroshi Makihira, Yasuhiko Nakayama, Minoru Yoshida, Yukihiro Shibata +1 more | 2004-01-06 |
| 6654112 | Apparatus and method for inspecting defects | Minori Noguchi, Yukihiro Shibata, Takanori Ninomiya | 2003-11-25 |
| 6621571 | Method and apparatus for inspecting defects in a patterned specimen | Atsushi Yoshida, Yukihiro Shibata, Toshihiko Nakata, Hiroaki Shishido, Minoru Yoshida +1 more | 2003-09-16 |
| 6587581 | Visual inspection method and apparatus therefor | Yukio Matsuyama, Yuji Takagi, Takashi Hiroi, Maki Tanaka, Asahiro Kuni +2 more | 2003-07-01 |
| 6566671 | Microscopic defect inspection apparatus and method thereof, as well as positional shift calculation circuit therefor | Atsushi Yoshida, Takafumi Okabe, Hisashi Mizumoto, Mitsunobu Isobe | 2003-05-20 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |
| 6556290 | Defect inspection method and apparatus therefor | Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto, Hiroaki Shishido +1 more | 2003-04-29 |
| 6507417 | Method and apparatus for picking up 2D image of an object to be sensed | Hiroshi Makihira, Kenji Oka, Minoru Yoshida, Yasuhiko Nakayama | 2003-01-14 |
| 6456951 | Method and apparatus for processing inspection data | Yasuhiro Yoshitake, Kenji Oka, Masataka Shiba, Atsushi Shimoda | 2002-09-24 |
| 6404498 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected | Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2002-06-11 |
| 6400454 | Apparatus and method for inspector defects | Minori Noguchi, Yukihiro Shibata, Takanori Ninomiya | 2002-06-04 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |