Issued Patents All Time
Showing 101–125 of 170 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7271908 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Minori Noguchi, Masahiko Nakada, Takahiko Suzuki, Taketo Ueno, Toshihiko Nakata | 2007-09-18 |
| 7251024 | Defect inspection method and apparatus therefor | Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto, Hiroaki Shishido +1 more | 2007-07-31 |
| 7231079 | Method and system for inspecting electronic circuit pattern | Hirohito Okuda, Yuji Takagi, Masahiro Watanabe, Minori Noguchi, Yoshimasa Ooshima +1 more | 2007-06-12 |
| 7221486 | Method and apparatus for picking up 2D image of an object to be sensed | Hiroshi Makihira, Kenji Oka, Minoru Yoshida, Yasuhiko Nakayama | 2007-05-22 |
| 7218389 | Method and apparatus for inspecting pattern defects | Sachio Uto, Minoru Yoshida, Toshihiko Nakata | 2007-05-15 |
| 7205549 | Pattern defect inspection method and its apparatus | Minoru Yoshida, Hidetoshi Nishiyama, Masahiro Watanabe | 2007-04-17 |
| 7180584 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected | Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2007-02-20 |
| 7173693 | Method for inspecting defects and an apparatus of the same | Yukihiro Shibata, Yukio Kembo | 2007-02-06 |
| 7161671 | Method and apparatus for inspecting defects | Yukihiro Shibata | 2007-01-09 |
| 7142708 | Defect detection method and its apparatus | Kaoru Sakai, Takafumi Okabe | 2006-11-28 |
| 7142294 | Method and apparatus for detecting defects | Yukihiro Shibata | 2006-11-28 |
| 7132669 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Minoru Yoshida, Sachio Uto | 2006-11-07 |
| 7127126 | Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections | Kaoru Sakai, Takafumi Okabe | 2006-10-24 |
| 7110105 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe | 2006-09-19 |
| 7092095 | Method and apparatus for observing and inspecting defects | Yukihiro Shibata, Kazuo Yamaguchi, Minoru Yoshida, Atsushi Yoshida, Kenji Oka +1 more | 2006-08-15 |
| 7061600 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected | Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2006-06-13 |
| 7026830 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2006-04-11 |
| 7020350 | Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections | Kaoru Sakai, Takafumi Okabe | 2006-03-28 |
| 6996193 | Timing error detection circuit, demodulation circuit and methods thereof | Taku Yamagata | 2006-02-07 |
| 6947587 | Defect inspection method and apparatus | Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2005-09-20 |
| 6943876 | Method and apparatus for detecting pattern defects | Minoru Yoshida, Sachio Uto, Toshihiko Nakata | 2005-09-13 |
| 6927847 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe | 2005-08-09 |
| 6921905 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Minoru Yoshida, Sachio Uto | 2005-07-26 |
| 6900888 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2005-05-31 |
| 6897956 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Minori Noguchi, Masahiko Nakada, Takahiko Suzuki, Taketo Ueno, Toshihiko Nakata | 2005-05-24 |