Issued Patents All Time
Showing 76–100 of 170 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7528942 | Method and apparatus for detecting defects | Hiroyuki Nakano, Toshihiko Nakata, Sachio Uto, Akira Hamamatsu, Yuta Urano | 2009-05-05 |
| 7512259 | Defect inspection method and apparatus | Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2009-03-31 |
| 7508973 | Method of inspecting defects | Takafumi Okabe, Yukihiro Shibata, Hidetoshi Nishiyama | 2009-03-24 |
| 7499162 | Method and apparatus for observing and inspecting defects | Yukihiro Shibata, Kazuo Yamaguchi, Minoru Yoshida, Atsushi Yoshida, Kenji Oka +1 more | 2009-03-03 |
| 7489395 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe | 2009-02-10 |
| 7474394 | Apparatus of inspecting defect in semiconductor and method of the same | Akira Hamamatsu, Hisae Shibuya | 2009-01-06 |
| 7465935 | Method for inspecting pattern defect and device for realizing the same | Yuta Urano, Hiroyuki Nakano, Sachio Uto | 2008-12-16 |
| 7463350 | Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal | Hidetoshi Nishiyama, Minoru Yoshida, Yukihiro Shibata | 2008-12-09 |
| 7460220 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected | Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2008-12-02 |
| 7456963 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Minoru Yoshida, Sachio Uto | 2008-11-25 |
| 7440092 | Method and apparatus for detecting defects | Yukihiro Shibata | 2008-10-21 |
| 7433508 | Pattern inspection method and its apparatus | Kaoru Sakai, Takafumi Okabe | 2008-10-07 |
| 7417444 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2008-08-26 |
| 7400393 | Method and apparatus for detecting defects in a specimen utilizing information concerning the specimen | Yukihiro Shibata, Hidetoshi Nishiyama | 2008-07-15 |
| 7388979 | Method and apparatus for inspecting pattern defects | Kaoru Sakai, Takafumi Okabe | 2008-06-17 |
| 7372561 | Method and apparatus for inspecting defects and a system for inspecting defects | Yukihiro Shibata, Takafumi Okabe, Yoichi Takahara | 2008-05-13 |
| 7359044 | Method and apparatus for inspecting pattern defects | Hidetoshi Nishiyama, Yukihiro Shibata, Minoru Yoshida | 2008-04-15 |
| 7333677 | Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections | Kaoru Sakai, Takafumi Okabe | 2008-02-19 |
| 7333192 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama +1 more | 2008-02-19 |
| 7330248 | Method and apparatus for inspecting defects | Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2008-02-12 |
| 7305015 | Ultraviolet laser-generating device and defect inspection apparatus and method therefor | Sachio Uto, Minoru Yoshida, Toshihiko Nakata | 2007-12-04 |
| 7299147 | Systems for managing production information | Yukihiro Shibata | 2007-11-20 |
| 7295305 | Method and its apparatus for inspecting a pattern | Minoru Yoshida, Hidetoshi Nishiyama | 2007-11-13 |
| 7274813 | Defect inspection method and apparatus | Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2007-09-25 |
| 7271892 | Method and apparatus for inspecting defects | Yukihiro Shibata, Masahiro Watanabe | 2007-09-18 |