Issued Patents All Time
Showing 51–75 of 170 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973920 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama +1 more | 2011-07-05 |
| 7962311 | Method using capacitive sensors for morphology discrimination of a passenger seating in an automotive seat | Claude Launay, Tomoaki Hirai, Joaquim Da Silva, Florent Voisin, Takanori Ninomiya | 2011-06-14 |
| 7952699 | Apparatus of inspecting defect in semiconductor and method of the same | Akira Hamamatsu, Hisae Shibuya | 2011-05-31 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2011-05-31 |
| 7949178 | Pattern inspection method and its apparatus | Kaoru Sakai, Takafumi Okabe | 2011-05-24 |
| 7940385 | Defect inspection apparatus and its method | Akira Hamamatsu, Hisae Shibuya | 2011-05-10 |
| 7916929 | Defect inspection method and apparatus | Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2011-03-29 |
| 7903249 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe | 2011-03-08 |
| 7895014 | Method for improving the localisation of a target in regard of a sensor | Claude Launay, Joaquim Da Silva, Florent Voisin, Tomoaki Hirai, Takanori Ninomiya | 2011-02-22 |
| 7869966 | Inspection method and its apparatus, inspection system | Takafumi Okabe, Kaoru Sakai | 2011-01-11 |
| 7851753 | Method and apparatus for reviewing defects | Sachio Uto | 2010-12-14 |
| 7848563 | Method and apparatus for inspecting a defect of a pattern | Kaoru Sakai, Hisae Shibuya, Hidetoshi Nishiyama | 2010-12-07 |
| 7834992 | Method and its apparatus for detecting defects | Minoru Yoshida | 2010-11-16 |
| 7826047 | Apparatus and method for optical inspection | Yukihiro Shibata | 2010-11-02 |
| 7792352 | Method and apparatus for inspecting pattern defects | Kaoru Sakai, Takafumi Okabe | 2010-09-07 |
| 7791725 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Minoru Yoshida, Sachio Uto | 2010-09-07 |
| 7768635 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama +1 more | 2010-08-03 |
| 7751037 | Method and apparatus for detecting defects | Hiroyuki Nakano, Toshihiko Nakata, Sachio Uto, Akira Hamamatsu, Yuta Urano | 2010-07-06 |
| 7751036 | Apparatus of inspecting defect in semiconductor and method of the same | Akira Hamamatsu, Hisae Shibuya | 2010-07-06 |
| 7714997 | Apparatus for inspecting defects | Yukihiro Shibata | 2010-05-11 |
| 7711178 | Pattern inspection method and its apparatus | Kaoru Sakai, Takafumi Okabe, Hiroshi Goto, Masayuki Kuwabara, Naoya Takeuchi | 2010-05-04 |
| 7664608 | Defect inspection method and apparatus | Yuta Urano, Akira Hamamatsu, Kaoru Sakai | 2010-02-16 |
| 7646477 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2010-01-12 |
| 7620232 | Method and apparatus for pattern inspection | Kaoru Sakai, Hidetoshi Nishiyama | 2009-11-17 |
| 7599545 | Method and its apparatus for inspecting defects | Yukihiro Shibata, Hitoshi Kubota | 2009-10-06 |