Issued Patents All Time
Showing 151–170 of 170 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6329826 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-12-11 |
| 6317512 | Pattern checking method and checking apparatus | Hitoshi Kubota, Hiroshi Makihira, Takashi Hiroi | 2001-11-13 |
| 6263099 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected | Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2001-07-17 |
| 6236057 | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2001-05-22 |
| 6172363 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-01-09 |
| 6169282 | Defect inspection method and apparatus therefor | Kenji Oka, Hiroshi Makihira, Yasuhiko Nakayama, Minoru Yoshida, Yukihiro Shibata +1 more | 2001-01-02 |
| 6128352 | Receiving apparatus for performing digital broadcast channel selection and demodulation | — | 2000-10-03 |
| 6091075 | Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus | Yukihiro Shibata, Hiroshi Makihara, Minoru Yoshida, Yasuhiko Nakayama, Kenji Oka | 2000-07-18 |
| 6087673 | Method of inspecting pattern and apparatus thereof | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2000-07-11 |
| 5774222 | Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected | Yasuhiko Nakayama, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 1998-06-30 |
| 5649022 | Pattern checking method and checking apparatus | Hitoshi Kubota, Hiroshi Makihira, Takashi Hiroi | 1997-07-15 |
| 5430548 | Method and apparatus for pattern detection | Takashi Hiroi, Hitoshi Kubota, Hiroshi Makihira, Mitsunobu Isobe | 1995-07-04 |
| D351469 | Portable automatic blood glucose analyzer | Mitsunari Okamoto | 1994-10-11 |
| 5309108 | Method of inspecting thin film transistor liquid crystal substrate and apparatus therefor | Hitoshi Kubota, Makoto Ono | 1994-05-03 |
| 5229607 | Combination apparatus having a scanning electron microscope therein | Hironobu Matsui, Mikio Ichihashi, Sumio Hosaka, Yoshinori Nakayama, Satoshi Haraichi +9 more | 1993-07-20 |
| 5157735 | Chipping detection system and method | Hitoshi Kubota, Satoru Fushimi, Takashi Hiroi | 1992-10-20 |
| 5153444 | Method and apparatus for detecting patterns | Takashi Hiroi, Hitoshi Kubota, Hiroshi Makihira, Fumiaki Endo | 1992-10-06 |
| 5038048 | Defect detection system and method for pattern to be inspected utilizing multiple-focus image signals | Htoshi Kubota | 1991-08-06 |
| 4791586 | Method of and apparatus for checking geometry of multi-layer patterns for IC structures | Hitoshi Kubota, Satoru Fushimi, Hiroshi Makihira, Takanori Ninomiya, Yasuo Nakagawa | 1988-12-13 |
| 4725722 | Automatic focusing method and apparatus utilizing contrasts of projected pattern | Hiroshi Makihira, Hitoshi Kubota | 1988-02-16 |