Issued Patents All Time
Showing 26–50 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9104016 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Martin Mahlmann, Bernhard Geuppert +2 more | 2015-08-11 |
| 9081296 | Replacement apparatus for an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2015-07-14 |
| 9075174 | Positioning unit and apparatus for adjustment of an optical element | Ulrich Weber | 2015-07-07 |
| 9046795 | Optical element unit for exposure processes having sealing element | Tilman Schwertner, Ulrich Bingel, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2015-06-02 |
| 8988654 | Support elements for an optical element | Ulrich Weber, Nicolai Wengert | 2015-03-24 |
| 8902401 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek, Payam Tayebati +1 more | 2014-12-02 |
| 8902519 | Replacement apparatus for an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2014-12-02 |
| 8854602 | Holding device for an optical element in an objective | Bernhard Gellrich, Andreas Wurmbrand, Armin Schoeppach, Christian Zengerling, Stephane Bruynooghe | 2014-10-07 |
| 8760777 | Positioning unit and apparatus for adjustment of an optical element | Ulrich Weber | 2014-06-24 |
| 8711331 | Optical module for a microlithography objective including holding and supporting devices | Franz Sorg, Yim-Bun Patrick Kwan | 2014-04-29 |
| 8698999 | Protection module for EUV lithography apparatus, and EUV lithography apparatus | Dirk Heinrich Ehm, Timo Laufer, Ben Banney, Ulrich Nieken, Franz Keller | 2014-04-15 |
| 8659745 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering +7 more | 2014-02-25 |
| 8553202 | Projection objective for microlithography | Tilman Schwertner | 2013-10-08 |
| 8542346 | Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations | Guido Limbach, Franz Sorg, Armin Schoeppach, Ulrich Weber, Ulrich Loering +7 more | 2013-09-24 |
| 8493674 | Positioning unit and alignment device for an optical element | Ulrich Weber | 2013-07-23 |
| 8488261 | Replacement apparatus for an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2013-07-16 |
| 8416515 | Positioning unit and alignment device for an optical element | Ulrich Weber | 2013-04-09 |
| 8363206 | Optical imaging device with thermal attenuation | Bernhard Gellrich, Thomas Ittner, Stefan Hembacher, Karl-Heinz Schimitzek, Payam Tayebati +1 more | 2013-01-29 |
| 8351139 | Optical element module with minimized parasitic loads | Ulrich Weber, Dirk Schaffer | 2013-01-08 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2012-12-11 |
| 8300210 | Optical projection system | Johannes Rau, Armin Schoeppach, Bernhard Gellrich, Martin Mahlmann, Bernhard Geuppert +2 more | 2012-10-30 |
| 8035903 | Positioning unit and alignment device for an optical element | Ulrich Weber | 2011-10-11 |
| 8027023 | Optical imaging device and method for reducing dynamic fluctuations in pressure difference | Stefan Hembacher, Bernhard Gellrich, Sascha Bleidistel | 2011-09-27 |
| 7995296 | Replacement apparatus for an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2011-08-09 |
| 7986472 | Optical element module | Ulrich Weber, Bernhard Gellrich, Yim-Bun Patrick Kwan, Peter Deufel | 2011-07-26 |