Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7768723 | Replacement apparatus for an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2010-08-03 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Yim-Bun Patrick Kwan, Stefan Xalter, Johannes Lippert, Ulrich Weber +8 more | 2010-07-20 |
| 7738193 | Positioning unit and alignment device for an optical element | Ulrich Weber | 2010-06-15 |
| 7581305 | Method of manufacturing an optical component | Bernhard Geuppert, Thomas Ittner, Bernd Geh, Rolf Freimann, Guenther Seitz +3 more | 2009-09-01 |
| 7545483 | Optical element unit for exposure processes | Bernhard Gellrich, Thomas Schletterer, Guido Limbach, Julian Kaller, Hans-Juergen Scherle +2 more | 2009-06-09 |
| 7515359 | Support device for positioning an optical element | Ulrich Weber, Sabine Hafenrichter | 2009-04-07 |
| 7515363 | Replacement apparatus for an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2009-04-07 |
| 7265917 | Replacement apparatus for an optical element | Franz Sorg, Andreas Wurmbrand, Thomas Schletterer, Thomas Ittner | 2007-09-04 |
| 7170585 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Winfried Kaiser, Alexander Kohl +2 more | 2007-01-30 |
| 7061698 | Lens system, in particular a projection lens system for semiconductor lithography | Karlfrid Osterried, Thomas Petasch | 2006-06-13 |
| 6879379 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Winfried Kaiser, Alexander Kohl +2 more | 2005-04-12 |
| 6744574 | Mount for an optical element in an optical imaging device | Ulrich Weber, Jochen Becker, Hubert Holderer, Bernhard Gellrich | 2004-06-01 |