Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8698999 | Protection module for EUV lithography apparatus, and EUV lithography apparatus | Dirk Heinrich Ehm, Timo Laufer, Jens Kugler, Ulrich Nieken, Franz Keller | 2014-04-15 |
| 6619044 | Heat exchanger for an electronic heat pump | Andrew Batchelor, David McDonald, Tilak T. Chandratilleke | 2003-09-16 |
| 6446442 | Heat exchanger for an electronic heat pump | Andrew Batchelor, David McDonald, Tilak T. Chandratilleke | 2002-09-10 |