Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8698999 | Protection module for EUV lithography apparatus, and EUV lithography apparatus | Dirk Heinrich Ehm, Timo Laufer, Ben Banney, Jens Kugler, Ulrich Nieken | 2014-04-15 |
| 4638314 | Meter transponder hybrid | — | 1987-01-20 |
| 4543328 | Process for detecting pathogens | Hans-Georg Hennemann | 1985-09-24 |