Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10816909 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Nitesh Pandey, Vasco Tomas Tenner +1 more | 2020-10-27 |
| 10739687 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Bastiaan Onne Fagginger Auer, Davit Harutyunyan | 2020-08-11 |
| 10481506 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Martin Jacobus Johan Jak, Mohammadreza Hajiahmadi, Grzegorz Grzela +1 more | 2019-11-19 |
| 10474043 | Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method | Maurits Van Der Schaar, Grzegorz Grzela, Erik Johan Koop, Victor Emanuel Calado, Si-Han Zeng | 2019-11-12 |
| 10466594 | Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing method | Simon Philip Spencer Hastings, Alberto Da Costa Assafrao, Lukasz Jerzy Macht | 2019-11-05 |
| 10437163 | Method and apparatus for design of a metrology target | Maurits Van Der Schaar, Murat Bozkurt, Stefan Cornelis Theodorus Van Der Sanden | 2019-10-08 |
| 10261427 | Metrology method and apparatus, computer program and lithographic system | Si-Han Zeng, Yue-Lin Peng, Jen-Yu Fang, Arie Jeffrey Den Boef, Alexander Straaijer +1 more | 2019-04-16 |
| 10162271 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Bastiaan Onne Fagginger Auer, Davit Harutyunyan | 2018-12-25 |
| 9946167 | Metrology method and inspection apparatus, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Arno Jan Bleeker, Willem Marie Julia Marcel Coene, Michael Kubis | 2018-04-17 |
| 9869940 | Metrology method and apparatus, computer program and lithographic system | Si-Han Zeng, Yue-Lin Peng, Jen-Yu Fang, Arie Jeffrey Den Boef, Alexander Straaijer +1 more | 2018-01-16 |
| 9753379 | Inspection apparatus and methods, methods of manufacturing devices | Amandev Singh, Henricus Petrus Maria Pellemans | 2017-09-05 |
| 9535342 | Metrology method and apparatus, and device manufacturing method | Hendrik Jan Hidde Smilde | 2017-01-03 |
| 9331022 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Kaustuve Bhattacharyya, Hendrik Jan Hidde Smilde, Michael Kubis | 2016-05-03 |
| 9140998 | Metrology method and inspection apparatus, lithographic system and device manufacturing method | Hendrik Jan Hidde Smilde, Arno Jan Bleeker, Willem Marie Julia Marcel Coene, Michael Kubis | 2015-09-22 |
| 9069264 | Metrology method and apparatus, and device manufacturing method | Mark Van Schijndel, Michael Kubis | 2015-06-30 |
| 8908152 | Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures | Franciscus Godefridus Casper Bijnen, Jozef Cornelis Antonius Roijers, Marc Van Kemenade, Hoite Pieter Theodoor Tolsma | 2014-12-09 |
| 8867020 | Metrology method and apparatus, and device manufacturing method | Hendrik Jan Hidde Smilde | 2014-10-21 |
| 8709687 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Kaustuve Bhattacharyya, Hendrik Jan Hidde Smilde, Michael Kubis | 2014-04-29 |
| 8319967 | Marker structure and method of forming the same | Richard Johannes Franciscus Van Haren, Sanjaysingh Lalbahadoersing, Sami Musa, Maya Angelova Doytcheva | 2012-11-27 |
| 8208121 | Alignment mark and a method of aligning a substrate comprising such an alignment mark | Franciscus Godefridus Casper Bijnen, Manfred Gawein Tenner, Marc Van Kemenade | 2012-06-26 |
| 8208139 | Alignment system and alignment marks for use therewith | Edo Maria Hulsebos, Franciscus Godefridus Casper Bijnen | 2012-06-26 |
| 8208140 | Alignment system and alignment marks for use therewith | Edo Maria Hulsebos, Franciscus Godefridus Casper Bijnen | 2012-06-26 |
| 8130366 | Method for coarse wafer alignment in a lithographic apparatus | Franciscus Godefridus Casper Bijnen | 2012-03-06 |
| 8080462 | Mark structure for coarse wafer alignment and method for manufacturing such a mark structure | — | 2011-12-20 |
| 7989966 | Mark structure for coarse wafer alignment and method for manufacturing such a mark structure | — | 2011-08-02 |