Issued Patents All Time
Showing 26–50 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811323 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma +5 more | 2020-10-20 |
| 10732514 | Metrology method and apparatus with increased bandwidth | Seyed Iman Mossavat, Paul Christiaan Hinnen | 2020-08-04 |
| 10677589 | Substrate, metrology apparatus and associated methods for a lithographic process | Alok Verma, Thomas Theeuwes, Anagnostis Tsiatmas, Bert Verstraeten | 2020-06-09 |
| 10627213 | Statistical hierarchical reconstruction from metrology data | Seyed Iman Mossavat, Remco Dirks | 2020-04-21 |
| 10615084 | Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma +1 more | 2020-04-07 |
| 10571363 | Method of determining an optimal focus height for a metrology apparatus | Mariya Vyacheslavivna Medvedyeva, Anagnostis Tsiatmas, Martinus Hubertus Maria Van Weert, Bastiaan Onne Fagginger Auer, Xiaoxin Shang +2 more | 2020-02-25 |
| 10546790 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma +1 more | 2020-01-28 |
| 10488768 | Beat patterns for alignment on small metrology targets | Bastiaan Onne Fagginger Auer, Paul Christiaan Hinnen, Anagnostis Tsiatmas, Mariya Vyacheslavivna Medvedyeva | 2019-11-26 |
| 10481503 | Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method | Maurits Van Der Schaar, Youping Zhang, Hendrik Jan Hidde Smilde, Anagnostis Tsiatmas, Adriaan Johan Van Leest +3 more | 2019-11-19 |
| 10453758 | Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma +1 more | 2019-10-22 |
| 10394135 | Method and apparatus for measuring a parameter of a lithographic process, computer program products for implementing such methods and apparatus | Bastiaan Onne Fagginger Auer | 2019-08-27 |
| 10317805 | Method for monitoring a characteristic of illumination from a metrology apparatus | Jolanda Theodora Josephina Schmetz-Schagen, Armand Eugene Albert Koolen, Bastiaan Onne Fagginger Auer | 2019-06-11 |
| 10180628 | Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method | Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Maurits Van Der Schaar, Te-Chih Huang | 2019-01-15 |
| 10156797 | Method of determining edge placement error, inspection apparatus, patterning device, substrate and device manufacturing method | Seyed Iman Mossavat, Maurits Van Der Schaar | 2018-12-18 |
| 10151985 | Process flagging and cluster detection without requiring reconstruction | Remco Dirks, Seyed Iman Mossavat | 2018-12-11 |
| 10132763 | Inspection method and apparatus, lithographic system and device manufacturing method | Robert John Socha, Patricius Aloysius Jacobus Tinnemans, Jean-Pierre Agnes Henricus Marie Vaessen | 2018-11-20 |
| 9977340 | Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatus | Maria Johanna Hendrika Aben, Noelle Martina Wright, Ruben Alvarez Sanchez, Martijn Jaap Daniel Slob | 2018-05-22 |
| 9964853 | Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method | Peter Clement Paul Vanoppen, Eric Brouwer, Jan Hendrik Den Besten, Adrianus Franciscus Petrus Engelen, Paul Christiaan Hinnen | 2018-05-08 |
| 9952517 | Method of determining dose, inspection apparatus, patterning device, substrate and device manufacturing method | Alok Verma | 2018-04-24 |
| 9760018 | Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure | Seyed Iman Mossavat, Willem Jan Grootjans, Adriaan Johan Van Leest | 2017-09-12 |
| 9436099 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Marcus Adrianus Van De Kerkhof, Johannes Anna Quaedackers, Christine Corinne Mattheus | 2016-09-06 |
| 9188875 | Calibration method, inspection method and apparatus, lithographic apparatus, and lithographic processing cell | Maurits Van Der Schaar | 2015-11-17 |
| 9182682 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Paul Christiaan Hinnen | 2015-11-10 |
| 9128065 | Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method | Antoine Gaston Marie Kiers, Henricus Petrus Maria Pellemans | 2015-09-08 |
| 9081303 | Methods and scatterometers, lithographic systems, and lithographic processing cells | Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Hendrik Jan Hidde Smilde, Adrianus Johannes Hendrikus Schellekens, Michael Kubis | 2015-07-14 |