Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8994944 | Methods and scatterometers, lithographic systems, and lithographic processing cells | Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Hendrik Jan Hidde Smilde, Adrianus Johannes Hendrikus Schellekens, Michael Kubis | 2015-03-31 |
| 8891061 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Marcus Adrianus Van De Kerkhof, Johannes Anna Quaedackers, Christine Corinne Mattheus | 2014-11-18 |
| 8868387 | Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus | Arie Jeffrey Den Boef, Jouke Krist, Willem Jan Grootjans | 2014-10-21 |
| 8830472 | Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus | Arie Jeffrey Den Boef, Marcus Adrianus Van De Kerkhof, Henricus Petrus Maria Pellemans, Martin Ebert | 2014-09-09 |
| 8830447 | Inspection method for lithography | Arie Jeffrey Den Boef, Paul Christiaan Hinnen | 2014-09-09 |
| 8773657 | Method to determine the value of process parameters based on scatterometry data | Hans Van Der Laan, Rene Hubert Jacobus Carpaij, Antoine Gaston Marie Kiers | 2014-07-08 |
| 8705007 | Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method | Antoine Gaston Marie Kiers, Henricus Petrus Maria Pellemans | 2014-04-22 |
| 8520212 | Scatterometry method and measurement system for lithography | Willem Marie Julia Marcel Coene, Irwan Dani Setija | 2013-08-27 |
| 8390823 | Method, inspection apparatus and substrate for determining an approximate structure of an object on a substrate | Henricus Johannes Lambertus Megens | 2013-03-05 |
| 8294907 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Antoine Gaston Marie Kiers | 2012-10-23 |
| 8189195 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef, Mircea Dusa, Irwan Dani Setija | 2012-05-29 |
| 7916284 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Mircea Dusa, Arie Jeffrey Den Boef | 2011-03-29 |
| 7916927 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Antoine Gaston Marie Kiers, Durk Oeds Van Der Ploeg, Goce Naumoski, Roland Mark Van Weel | 2011-03-29 |
| 7738103 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a parameter of a target pattern | Antione Gaston Marie Kiers, Arie Jeffrey Den Boef | 2010-06-15 |
| 7605907 | Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method | Antoine Gaston Marie Kiers, Gerardus Maria Johannes Wijnand Janssen | 2009-10-20 |
| 7460237 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | — | 2008-12-02 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Mircea Dusa, Richard Johannes Franciscus Van Haren, Antoine Gaston Marie Kiers +7 more | 2006-09-26 |
| 6809797 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Carsten Kohler | 2004-10-26 |
| 5606465 | Information track format and reading and recording apparatuses therefor | Albert M. A. Rijckaert | 1997-02-25 |
| 4773207 | Arrangement for reverse-stranding (SZ-stranding) of at least one stranding element of a cable, in particular a stranding element containing a beam waveguide | — | 1988-09-27 |
| 4432196 | Telephone cable | H.-Joachim Schmitz, Dieter Braun, Dieter Trodler | 1984-02-21 |