Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7738103 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a parameter of a target pattern | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer | 2010-06-15 |