Issued Patents All Time
Showing 51–75 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607847 | Gate all around device and method of formation using angled ions | Min Gyu Sung, Sony Varghese, Anthony Renau, Joseph C. Olson | 2020-03-31 |
| 10600675 | Techniques and structure for forming thin silicon-on-insulator materials | Andrew Waite, John Hautala | 2020-03-24 |
| 10598832 | System and method for forming diffracted optical element having varied gratings | Rutger Meyer Timmerman Thijssen, Joseph C. Olson, Peter Kurunczi, Robert Masci | 2020-03-24 |
| 10553448 | Techniques for processing a polycrystalline layer using an angled ion beam | Tristan Y. Ma, Kevin Anglin, Robert Masci, John Hautala | 2020-02-04 |
| 10443934 | Substrate handling and heating system | Jason M. Schaller, D. Jeffrey Lischer, Ala Moradian, William T. Weaver, Robert Brent Vopat | 2019-10-15 |
| 10302826 | Controlling etch angles by substrate rotation in angled etch tools | Rutger Meyer Timmerman Thijssen, Joseph C. Olson | 2019-05-28 |
| 10276340 | Low particle capacitively coupled components for workpiece processing | Ernest E. Allen, Tyler Rockwell, Richard J. Hertel, Joseph F. Sommers, Christopher Campbell | 2019-04-30 |
| 10269663 | Critical dimensions variance compensation | Tristan Y. Ma, Kevin Anglin, Motoya Okazaki, Johannes M. van Meer | 2019-04-23 |
| 10222202 | Three dimensional structure fabrication control using novel processing system | Simon Ruffell, Tristan Y. Ma, Kevin Anglin | 2019-03-05 |
| 10090166 | Techniques for forming isolation structures in a substrate | Andrew Waite, Johannes M. van Meer, Jae-Young Lee | 2018-10-02 |
| 10081861 | Selective processing of a workpiece | Daniel Distaso, Stanislav S. Todorov, Mark R. Amato, William Davis Lee, Jillian Reno | 2018-09-25 |
| D825912 | Crutches | — | 2018-08-21 |
| 10002764 | Sputter etch material selectivity | Kevin Anglin, Tristan Y. Ma, John Hautala, Heyun Yin | 2018-06-19 |
| 9960089 | Apparatus and method for endpoint detection | Ross Bandy | 2018-05-01 |
| 9933314 | Semiconductor workpiece temperature measurement system | Klaus Petry, Jason M. Schaller, Ala Moradian | 2018-04-03 |
| 9899242 | Device and method for substrate heating during transport | Jason M. Schaller, Ala Moradian, Robert Brent Vopat, David Blahnik, William T. Weaver | 2018-02-20 |
| 9850569 | Ion implantation for superconductor tape fabrication | Connie P. Wang, Paul J. Murphy, Paul Sullivan, Ludovic Godet, Frank Sinclair | 2017-12-26 |
| 9738968 | Apparatus and method for controlling implant process | George M. Gammel, Stanislav S. Todorov, Norman E. Hussey, Gregory Gibilaro | 2017-08-22 |
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Robert Brent Vopat, Paul E. Pergande, Julian G. Blake +2 more | 2017-08-08 |
| 9685303 | Apparatus for heating and processing a substrate | Jason M. Schaller, D. Jeffrey Lischer, Ala Moradian | 2017-06-20 |
| 9633886 | Hybrid thermal electrostatic clamp | Jason M. Schaller, Ala Moradian, D. Jeffrey Lischer, Gregory Thronson | 2017-04-25 |
| 9287148 | Dynamic heating method and system for wafer processing | Kevin Anglin, D. Jeffrey Lischer, William T. Weaver, Jason M. Schaller, Robert Brent Vopat | 2016-03-15 |
| 9023722 | Compound semiconductor growth using ion implantation | Simon Ruffell | 2015-05-05 |
| 8969181 | Method for epitaxial layer overgrowth | Ludovic Godet, Christopher R. Hatem | 2015-03-03 |
| 8906727 | Heteroepitaxial growth using ion implantation | Chi-Chun Chen, Cheng-Huang Kuo | 2014-12-09 |