Issued Patents All Time
Showing 76–88 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8835287 | Method of implanting a workpiece to improve growth of a compound semiconductor | Ludovic Godet | 2014-09-16 |
| 8815720 | Method of etching a workpiece | Ludovic Godet, Chi-Chun Chen | 2014-08-26 |
| 7820987 | Predicting dose repeatability in an ion implantation | Norman E. Hussey, Steven R. Walther, Rekha Padmanabhan | 2010-10-26 |
| 7755066 | Techniques for improved uniformity tuning in an ion implanter system | — | 2010-07-13 |
| 7663125 | Ion beam current uniformity monitor, ion implanter and related method | William G. Callahan, George M. Gammel, Norman E. Hussey, Gregg Norris, Joseph C. Olson | 2010-02-16 |
| 7585141 | Load lock system for ion beam processing | Douglas E. May | 2009-09-08 |
| 7521691 | Magnetic monitoring of a Faraday cup for an ion implanter | Joseph P. Dzengeleski, Jay T. Scheuer, Ashwin Shetty, Kenneth Swenson | 2009-04-21 |
| 7358510 | Ion implanter with variable scan frequency | Joseph C. Olson | 2008-04-15 |
| 7355188 | Technique for uniformity tuning in an ion implanter system | Joseph C. Olson, Jonathan Gerald England, Douglas Thomas Fielder, Gregg Norris, Shengwu Chang +2 more | 2008-04-08 |
| 7342240 | Ion beam current monitoring | Steven R. Walther | 2008-03-11 |
| 7176470 | Technique for high-efficiency ion implantation | Douglas Thomas Fielder, Gregg Norris | 2007-02-13 |
| 6781139 | Load lock vacuum conductance limiting aperture | — | 2004-08-24 |
| 6690022 | Ion beam incidence angle and beam divergence monitor | Grant Kenji Larsen, Ashwin Purohit, Robert A. Poitras, Damian Brennan | 2004-02-10 |