Issued Patents All Time
Showing 1–25 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189305 | Metrology method and apparatus and computer program | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya, Samee Ur Rehman | 2025-01-07 |
| 12189314 | Metrology method and associated metrology and lithographic apparatuses | Sebastianus Adrianus GOORDEN, Leendert Jan KARSSEMEIJER, Manouk RIJPSTRA, Ralph Brinkhof, Kaustuve Bhattacharyya | 2025-01-07 |
| 12158435 | Illumination and detection apparatus for a metrology apparatus | Nitesh Pandey, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef | 2024-12-03 |
| 12130246 | Method for overlay metrology and apparatus thereof | Arie Jeffrey Den Boef, Kaustuve Bhattacharyya | 2024-10-29 |
| 12061421 | Method and system for determining information about a target structure | Arie Jeffrey Den Boef, Kaustuve Bhattacharyya, Keng-Fu Chang | 2024-08-13 |
| 12032299 | Metrology method and associated metrology and lithographic apparatuses | Patricius Aloysius Jacobus Tinnemans, Igor Matheus Petronella Aarts, Kaustuve Bhattacharyya, Ralph Brinkhof, Leendert Jan KARSSEMEIJER +4 more | 2024-07-09 |
| 12013647 | Metrology method | Marc Johannes Noot, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Grzegorz Grzela, Timothy Dugan Davis +4 more | 2024-06-18 |
| 11886125 | Method for inferring a local uniformity metric | Kaustuve Bhattacharyya | 2024-01-30 |
| 11391677 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Stefan Michiel Witte, Gijsbert Simon Matthijs Jansen, Lars Christian Freisem, Kjeld Sijbrand Eduard Eikema | 2022-07-19 |
| 11360399 | Metrology sensor for position metrology | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Henricus Petrus Maria Pellemans | 2022-06-14 |
| 11300883 | Method to determine a patterning process parameter | Martin Jacobus Johan Jak, Kaustuve Bhattacharyya, Won-Jae Jang, Jinmoo Byun | 2022-04-12 |
| 11022900 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Stefan Hunsche, Markus Gerardus Martinus Maria Van Kraaij | 2021-06-01 |
| 10983361 | Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus | Sander Bas Roobol, Stefan Michael Bruno Bäumer | 2021-04-20 |
| 10942460 | Mark position determination method | Maikel Robert GOOSEN | 2021-03-09 |
| 10908513 | Metrology method and apparatus and computer program | Marc Johannes Noot, Kaustuve Bhattacharyya, Jinmoo Byun, Hyun-Su Kim, Won-Jae Jang +1 more | 2021-02-02 |
| 10816906 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Arie Jeffrey Den Boef, Sander Bas Roobol, Niels Geypen | 2020-10-27 |
| 10788766 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Sebastianus Adrianus GOORDEN, Simon Reinald HUISMAN, Duygu Akbulut, Alessandro Polo | 2020-09-29 |
| 10761432 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Stefan Hunsche, Markus Gerardus Martinus Maria Van Kraaij | 2020-09-01 |
| 10705437 | Metrology method and apparatus, computer program and lithographic system | Narjes JAVAHERI, Mohammadreza Hajiahmadi, Murat Bozkurt, Alberto Da Costa Assafrao, Marc Johannes Noot +1 more | 2020-07-07 |
| 10656533 | Metrology in lithographic processes | Martin Jacobus Johan Jak, Kaustuve Bhattacharyya | 2020-05-19 |
| 10649344 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Sander Bas Roobol | 2020-05-12 |
| 10648919 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Stefan Michiel Witte, Gijsbert Simon Matthijs Jansen, Lars Christian Freisem, Kjeld Sijbrand Eduard Eikema | 2020-05-12 |
| 10630037 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-04-21 |
| 10607873 | Substrate edge detection | Eric Anthony Janda, Cayetano Sanchez-Fabres Cobaleda, Bernd Geh | 2020-03-31 |
| 10599047 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Zili Zhou, Armand Eugene Albert Koolen, Sebastianus Adrianus GOORDEN +1 more | 2020-03-24 |