Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585363 | Alignment system | Arie Jeffrey Den Boef, Alessandro Polo, Patricius Aloysius Jacobus Tinnemans, Adrianus Johannes Hendrikus Schellekens, Elahe Yeganegi Dastgerdi +3 more | 2020-03-10 |
| 10530111 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Sudhir Srivastava, Sander Bas Roobol, Nan Lin, Sjoerd Nicolaas Lambertus Donders, Krijn Frederik Bustraan +2 more | 2020-01-07 |
| 10527959 | Position sensor, lithographic apparatus and method for manufacturing devices | Simon Reinald HUISMAN, Sebastianus Adrianus GOORDEN, Duygu Akbulut, Alessandro Polo | 2020-01-07 |
| 10514620 | Alignment method | Franciscus Godefridus Casper Bijnen, Vassili Demergis, Edo Maria Hulsebos | 2019-12-24 |
| 10474039 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Paul Christiaan Hinnen, Maikel Robert GOOSEN, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2019-11-12 |
| 10466601 | Alignment sensor for lithographic apparatus | Alessandro Polo, Patricius Aloysius Jacobus Tinnemans, Scott Coston, Ronan James Havelin | 2019-11-05 |
| 10451978 | Metrology parameter determination and metrology recipe selection | Kaustuve Bhattacharyya, Marc Johannes Noot, Arie Jeffrey Den Boef, Mohammadreza Hajiahmadi, Farzad Farhadzadeh | 2019-10-22 |
| 10451559 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Sander Bas Roobol, Sietse Thijmen Van Der Post | 2019-10-22 |
| 10416577 | Position measuring method of an alignment target | Ralph Brinkhof, Maikel Robert GOOSEN, Vassili Demergis, Bartolomeus Petrus Rijpers | 2019-09-17 |
| 10386735 | Lithographic apparatus alignment sensor and method | Arie Jeffrey Den Boef, Nitesh Pandey, Patricius Aloysius Jacobus Tinnemans, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema | 2019-08-20 |
| 10379448 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Sander Bas Roobol, Nan Lin, Willem Marie Julia Marcel Coene, Arie Jeffrey Den Boef | 2019-08-13 |
| 10330606 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Peter Danny Van Voorst, Nan Lin, Sander Bas Roobol, Sietse Thijmen Van Der Post | 2019-06-25 |
| 10267744 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Patricius Aloysius Jacobus Tinnemans, Nan Lin, Sander Bas Roobol | 2019-04-23 |
| 10234771 | HHG source, inspection apparatus and method for performing a measurement | Nan Lin, Arie Jeffrey Den Boef, Sander Bas Roobol, Niels Geypen | 2019-03-19 |
| 10133192 | Method and apparatus for determining the property of a structure, device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Sander Bas Roobol, Nan Lin | 2018-11-20 |
| 10101675 | Metrology apparatus, method of measuring a structure and lithographic apparatus | Alessandro Polo | 2018-10-16 |
| 10067068 | Lithographic apparatus and method for performing a measurement | Arie Jeffrey Den Boef, Nan Lin, Sander Bas Roobol | 2018-09-04 |
| 10048596 | Method and apparatus for generating illuminating radiation | Nan Lin, Sander Bas Roobol | 2018-08-14 |
| 9970747 | Position measurement with illumination profile having two diametrically opposed off-axis radiation | Justin Kreuzer, Arie Jeffrey Den Boef | 2018-05-15 |
| 9958791 | Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method | Stefan Hunsche, Markus Gerardus Martinus Maria Van Kraaij | 2018-05-01 |
| 9939742 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef | 2018-04-10 |
| 9927726 | Polarization independent interferometer | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Justin Kreuzer | 2018-03-27 |
| 9857703 | Alignment sensor and lithographic apparatus | Arie Jeffrey Den Boef, Justin Kreuzer, Patricius Aloysius Jacobus Tinnemans | 2018-01-02 |
| 9835954 | Inspection method and apparatus, substrates for use therein and device manufacturing method | Erik Willem Bogaart, Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef | 2017-12-05 |
| 9778025 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Erik Willem Bogaart, Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef | 2017-10-03 |