Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278094 | Methods and apparatus for processing a substrate | Fernando Silveira, Chunlei Zhang | 2025-04-15 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik, Philip Allan Kraus +1 more | 2025-01-07 |
| 12144090 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Larry D. Elizaga, Silverst Rodrigues, Thai Cheng Chua, Philip Allan Kraus | 2024-11-12 |
| 12033835 | Modular microwave source with multiple metal housings | Philip Allan Kraus, Robert B. Moore, James D. Carducci, Sathya Swaroop Ganta, Karthikeyan Balaraman +1 more | 2024-07-09 |
| 11915850 | Two channel cosine-theta coil assembly | Kartik Ramaswamy, Larry D. Elizaga | 2024-02-27 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik, Philip Allan Kraus +1 more | 2024-01-23 |
| 11670489 | Modular microwave source with embedded ground surface | Joseph AuBuchon, James D. Carducci, Larry D. Elizaga, Philip Allan Kraus, Thai Cheng Chua | 2023-06-06 |
| 11564292 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Larry D. Elizaga, Silverst Rodrigues, Thai Cheng Chua, Philip Allan Kraus | 2023-01-24 |
| 11049694 | Modular microwave source with embedded ground surface | Joseph AuBuchon, James D. Carducci, Larry D. Elizaga, Philip Allan Kraus, Thai Cheng Chua | 2021-06-29 |
| 11043360 | Gas distribution plate assembly for high power plasma etch processes | James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Michael R. Rice, Vijay D. Parkhe | 2021-06-22 |
| 10811226 | Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates | James D. Carducci, Kenneth S. Collins, Jason A. Kenney, Kartik Ramaswamy, Shahid Rauf | 2020-10-20 |
| 10780447 | Apparatus for controlling temperature uniformity of a showerhead | Silverst Rodrigues, James D. Carducci | 2020-09-22 |
| 10537013 | Distributed electro-static chuck cooling | Fernando Silveira, Hamid Tavassoli | 2020-01-14 |
| 10395904 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Yang Yang, Steven Lane | 2019-08-27 |
| 10249470 | Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding | Jason A. Kenney, James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf | 2019-04-02 |
| 10170279 | Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding | Jason A. Kenney, James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf | 2019-01-01 |
| 10141166 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Yang Yang, Steven Lane | 2018-11-27 |
| 10131994 | Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2018-11-20 |
| 9928987 | Inductively coupled plasma source with symmetrical RF feed | Jason A. Kenney, James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf | 2018-03-27 |
| 9896769 | Inductively coupled plasma source with multiple dielectric windows and window-supporting structure | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2018-02-20 |
| 9870897 | Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates | James D. Carducci, Kenneth S. Collins, Jason A. Kenney, Kartik Ramaswamy, Shahid Rauf | 2018-01-16 |
| 9745663 | Symmetrical inductively coupled plasma source with symmetrical flow chamber | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2017-08-29 |
| 9155134 | Methods and apparatus for rapidly responsive heat control in plasma processing devices | Chunlei Zhang, Ezra Robert Gold, Ajit Balakrishna, James P. Cruse | 2015-10-06 |
| 9082590 | Symmetrical inductively coupled plasma source with side RF feeds and RF distribution plates | James D. Carducci, Kenneth S. Collins, Jason A. Kenney, Kartik Ramaswamy, Shahid Rauf | 2015-07-14 |
| 8980044 | Plasma reactor with a multiple zone thermal control feed forward control apparatus | Paul Brillhart, Hamid Tavassoli, Douglas A. Buchberger, Jr., Douglas H. Burns, Kallol Bera +5 more | 2015-03-17 |