Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7263216 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Chie Shishido, Yuji Takagi, Shuji Maeda, Takashi Hiroi, Masahiro Watanabe +1 more | 2007-08-28 |
| 7098055 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2006-08-29 |
| 7098455 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2006-08-29 |
| 7061602 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2006-06-13 |
| 7037735 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2006-05-02 |
| 7010447 | Method for inspecting defect and system therefor | Seiji Isogai, Shigeru Matsui, Toshiei Kurosaki | 2006-03-07 |
| 6888959 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2005-05-03 |
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Shunji Maeda, Hirofumi Tsuchiyama | 2004-10-19 |
| 6792359 | Method for inspecting defect and system therefor | Seiji Isogai, Shigeru Matsui, Toshiei Kurosaki | 2004-09-14 |
| 6760472 | Identification method for an article using crystal defects | Kazuo Takeda, Aritoshi Sugimoto | 2004-07-06 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Shunji Maeda, Hirofumi Tsuchiyama | 2004-06-22 |
| 6654112 | Apparatus and method for inspecting defects | Minori Noguchi, Shunji Maeda, Yukihiro Shibata | 2003-11-25 |
| 6614923 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Chie Shishido, Yuji Takagi, Shuji Maeda, Takashi Hiroi, Masahiro Watanabe +1 more | 2003-09-02 |
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2003-06-24 |
| 6576559 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Toshihiko Nakata, Sachio Uto, Hiroyuki Nakano | 2003-06-10 |
| 6411377 | Optical apparatus for defect and particle size inspection | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2002-06-25 |
| 6400454 | Apparatus and method for inspector defects | Minori Noguchi, Shunji Maeda, Yukihiro Shibata | 2002-06-04 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |
| 6355570 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Toshihiko Nakata, Sachio Uto, Hiroyuki Nakano | 2002-03-12 |
| 6236057 | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2001-05-22 |
| 6166380 | Resolving power evaluation method and specimen for electron microscope | Taiji Kitagawa, Mitsugu Sato, Goroku Shimoma, Tadanori Takahashi, Naoto Yoshida +3 more | 2000-12-26 |
| 6087673 | Method of inspecting pattern and apparatus thereof | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2000-07-11 |
| 5989928 | Method and device for detecting end point of plasma treatment, method and device for manufacturing semiconductor device, and semiconductor device | Toshihiko Nakata | 1999-11-23 |
| 5973777 | Method and apparatus for inspecting defects of surface shape | Mineo Nomoto, Yuji Takagi | 1999-10-26 |
| 5930382 | Wiring pattern inspecting method and system for carrying out the same | Yoko Irie, Hideaki Doi, Yasuhiko Hara, Tadashi Iida, Yasuhiro Fujishita +1 more | 1999-07-27 |