Issued Patents All Time
Showing 26–50 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298101 | Multi facet mirror of a microlithographic projection exposure apparatus | Thorsten Rassel | 2016-03-29 |
| 9207541 | Arrangement for mirror temperature measurement and/or thermal actuation of a mirror in a microlithographic projection exposure apparatus | Norman Baer, Holger Walter, Joachim Hartjes | 2015-12-08 |
| 9195151 | Device for controlling temperature of an optical element | — | 2015-11-24 |
| 9146002 | Support structure and related assemblies and methods | Martin Latzel | 2015-09-29 |
| 9116440 | Optical module for guiding a radiation beam | Severin Waldis, Wilfried Noell, Yves Petremend, Marco Jassmann, Lothar Kulzer +1 more | 2015-08-25 |
| 9081292 | Arrangement for actuating an element in a projection exposure apparatus | Ulrich Schoenhoff | 2015-07-14 |
| 9041910 | Multi facet mirror of a microlithographic projection exposure apparatus with a tilting actuator | Thorsten Rassel | 2015-05-26 |
| 8894225 | Device for controlling temperature of an optical element | — | 2014-11-25 |
| 8891172 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Ulrich Schoenhoff, Ole Fluegge +5 more | 2014-11-18 |
| 8861102 | Lithographic apparatus and thermal optical manipulator control method | Bastiaan Stephanus Hendricus Jansen, Ulrich Schönhoff | 2014-10-14 |
| 8710471 | Projection illumination system for EUV microlithography | Udo Dinger | 2014-04-29 |
| 8701262 | Support structure and related assemblies and methods | Martin Latzel | 2014-04-22 |
| 8632194 | Device for controlling temperature of an optical element | — | 2014-01-21 |
| 8587767 | Illumination optics for EUV microlithography and related system and apparatus | Damian Fiolka, Berndt Warm, Christian Steigerwald, Martin Endres, Ralf Stuetzle +6 more | 2013-11-19 |
| 8508854 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Ulrich Schoenhoff, Ole Fluegge +5 more | 2013-08-13 |
| 8328374 | Device for controlling temperature of an optical element | — | 2012-12-11 |
| 8325322 | Optical correction device | Ulrich Schoenhoff, Payam Tayebati, Michael Thier, Tilmann Heil, Ole Fluegge +7 more | 2012-12-04 |
| 8169595 | Optical apparatus and method for modifying the imaging behavior of such apparatus | Martin Schriever, Ulrich Wegmann, Stefan Hembacher, Bernhard Geuppert, Juergen Huber +2 more | 2012-05-01 |
| 8064151 | Lithographic apparatus and thermal optical manipulator control method | Bastiaan Stephanus Hendricus Jansen, Ulrich Schönhoff | 2011-11-22 |
| 8057053 | Device for controlling temperature of an optical element | — | 2011-11-15 |
| 7990622 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Boris Bittner, Sascha Bleidistel, Wolfgang Hummel, Arif Kazi +4 more | 2011-08-02 |
| 7830611 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Sascha Bleidistel, Wolfgang Hummel, Arif Kazi, Baerbel Schwaer +4 more | 2010-11-09 |
| 7768721 | Optical assembly, projection exposure apparatus and projection objective | Jochen Weber, Erich Merz, Ole Fluegge, Kai-Uwe Berroth, Cornelia Buehler | 2010-08-03 |
| 7528348 | Apparatus and method for measuring the temperature of substrates | — | 2009-05-05 |
| 7525640 | Lithographic apparatus and device manufacturing method | Bastiaan Stephanus Hendricus Jansen, Erik Roelof Loopstra, Marius Ravensbergen | 2009-04-28 |