Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7412299 | Process for determining the temperature of a semiconductor wafer in a rapid heating unit | Christoph Merkl, Christoph Striebel | 2008-08-12 |
| 7316969 | Method and apparatus for thermally treating substrates | Christoph Striebel | 2008-01-08 |
| 7169717 | Method of producing a calibration wafer | Christoph Merkl, Rolf Bremensdorfer | 2007-01-30 |
| 7056389 | Method and device for thermal treatment of substrates | Christoph Striebel | 2006-06-06 |
| 6847012 | Apparatus and method for measuring the temperature of substrates | — | 2005-01-25 |
| 6775471 | Method and device for thermally treating objects | Werner Blersch, Jochen Urban, Silke Paul, Uwe Ruby | 2004-08-10 |
| 6614005 | Device and method for thermally treating substrates | Heinrich Walk, Roland Mader, Werner Blersch | 2003-09-02 |
| 6600138 | Rapid thermal processing system for integrated circuits | Sing-Pin Tay, Yao Zhi Hu | 2003-07-29 |
| 6561694 | Method and device for calibrating measurements of temperatures independent of emissivity | Wilfried Lerch | 2003-05-13 |
| 6462315 | Optical radiation measurement apparatus | — | 2002-10-08 |
| 6369363 | Method of measuring electromagnetic radiation | Thomas Knarr, Heinrich Walk, Horst Balthasar, Uwe Muller | 2002-04-09 |
| 6191392 | Method of measuring electromagnetic radiation | Thomas Knarr, Heinrich Walk, Horst Balthasar, Uwe Muller | 2001-02-20 |