Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9164396 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2015-10-20 |
| 8319944 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2012-11-27 |
| 7990622 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Boris Bittner, Sascha Bleidistel, Markus Hauf, Wolfgang Hummel +4 more | 2011-08-02 |
| 7830611 | Projection objective of a microlithographic projection exposure apparatus | Olaf Conradi, Sascha Bleidistel, Markus Hauf, Wolfgang Hummel, Arif Kazi +4 more | 2010-11-09 |
| 7782440 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2010-08-24 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Erich Merz +11 more | 2009-02-03 |