Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9958793 | Lithographic apparatus, positioning system for use in a lithographic apparatus and method | Roan Marinus Westerhof, Hubertus Luberta Hagenaars, Adrianus Josephus Petrus Van Engelen | 2018-05-01 |
| 8861102 | Lithographic apparatus and thermal optical manipulator control method | Bastiaan Stephanus Hendricus Jansen, Markus Hauf | 2014-10-14 |
| 8064151 | Lithographic apparatus and thermal optical manipulator control method | Bastiaan Stephanus Hendricus Jansen, Markus Hauf | 2011-11-22 |