Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7588036 | Chamber clean method using remote and in situ plasma cleaning systems | Michael S. Cox, Canfeng Lai, Paddy Krishnaraj | 2009-09-15 |
| 7547643 | Techniques promoting adhesion of porous low K film to underlying barrier layer | Francimar Schmitt, Alexandros T. Demos, Derek R. Witty, Hichem M'Sadd, Sang-Hoon Ahn +2 more | 2009-06-16 |
| 7459404 | Adhesion improvement for low k dielectrics | Lihua Li, Tzu-Fang Huang, Li-Qun Xia, Peter Wai-Man Lee, Hichem M'Saad +2 more | 2008-12-02 |
| 7259111 | Interface engineering to improve adhesion between low k stacks | Deenesh Padhi, Ganesh Balasubramanian, Annamalai Lakshmanan, Juan Carlos Rocha-Alvarez, Bok Hoen Kim +3 more | 2007-08-21 |
| 7229911 | Adhesion improvement for low k dielectrics to conductive materials | Nagarajan Rajagopalan, Meiyee Shek, Albert Lee, Annamalai Lakshmanan, Li-Qun Xia | 2007-06-12 |
| 7189658 | Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile | Annamalai Lakshmanan, Deenesh Padhi, Ganesh Balasubramanian, Daemian Raj, Juan Carlos Rocha-Alvarez +2 more | 2007-03-13 |
| 7097886 | Deposition process for high aspect ratio trenches | Farhad Moghadam, Michael S. Cox, Padmanabhan Krishnaraj, Thanh Pham | 2006-08-29 |
| 7018941 | Post treatment of low k dielectric films | Josephine Chang, Alexandros T. Demos, Reza Arghavani, Derek R. Witty, Helen R. Armer +2 more | 2006-03-28 |
| 6992024 | Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques | Rick J. Roberts, Michael S. Cox, Jun Zhao | 2006-01-31 |
| 6936843 | Fixture used to prepare semiconductor specimens for film adhesion testing | — | 2005-08-30 |
| 6890597 | HDP-CVD uniformity control | Padmanabhan Krishnaraj, Bruno Geoffrion, Michael S. Cox, Lin Zhang, Bikram Kapoor +1 more | 2005-05-10 |
| 6878644 | Multistep cure technique for spin-on-glass films | Rick J. Roberts, Michael S. Cox, Jun Zhao, Khaled A. Elsheref, Alexandros T. Demos | 2005-04-12 |
| 6818894 | Method and apparatus for characterization of ultrathin silicon oxide films using mirror-enhanced polarized reflectance fourier transform infrared spectroscopy | Christos G. Takoudis | 2004-11-16 |
| 6790707 | Method of preparing a sample of a semiconductor structure for adhesion testing | — | 2004-09-14 |
| 6635144 | Apparatus and method for detecting an end point of chamber cleaning in semiconductor equipment | Padmanabhan Krishnaraj, Shamouil Shamouilian | 2003-10-21 |